JPH0414792U - - Google Patents
Info
- Publication number
- JPH0414792U JPH0414792U JP5410590U JP5410590U JPH0414792U JP H0414792 U JPH0414792 U JP H0414792U JP 5410590 U JP5410590 U JP 5410590U JP 5410590 U JP5410590 U JP 5410590U JP H0414792 U JPH0414792 U JP H0414792U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- journal
- bearing
- space
- gas exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jet Pumps And Other Pumps (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5410590U JPH0414792U (en]) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5410590U JPH0414792U (en]) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414792U true JPH0414792U (en]) | 1992-02-06 |
Family
ID=31575874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5410590U Pending JPH0414792U (en]) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414792U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146492A (ja) * | 1984-08-11 | 1986-03-06 | Mitsuwa Seiki Co Ltd | 分子ポンプ |
| JPS61140148A (ja) * | 1984-12-12 | 1986-06-27 | Nanbu Denki Seisakusho:Kk | 物品の移載装置 |
| JPS6238898A (ja) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | ねじ溝式真空ポンプ |
-
1990
- 1990-05-25 JP JP5410590U patent/JPH0414792U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146492A (ja) * | 1984-08-11 | 1986-03-06 | Mitsuwa Seiki Co Ltd | 分子ポンプ |
| JPS61140148A (ja) * | 1984-12-12 | 1986-06-27 | Nanbu Denki Seisakusho:Kk | 物品の移載装置 |
| JPS6238898A (ja) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | ねじ溝式真空ポンプ |